To delete the ATS cache folder for the current user:
sudo rm -rf `lsof | grep com.apple.ATS/annex.aux \
| grep Finder | cut -c 66-139`
To delete the ATS cache folder for all users:
sudo rm -rf /private/var/folders/*/*/-Caches-/com.apple.ATS
After running this script, the machine should be restarted so that the caches can rebuild.
This solution is from http://www.macosxhints.com/article.php?story=20071026081555971
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